Question 10.2: Determine the metal–semiconductor work function difference, ...

Determine the metal-semiconductor work function difference, \phi_{m s}, for a given MOS system and semiconductor doping.

For an aluminum-silicon dioxide junction, \phi_{m}^{\prime}=3.20 \mathrm{~V} and, for a silicon-silicon dioxide junction, \chi^{\prime}=3.25 \mathrm{~V}. We may assume that E_{g}=1.12 \mathrm{~V}. Let the p-type doping be N_{a}=10^{15} \mathrm{~cm}^{-3}.

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For silicon at T=300 \mathrm{~K}, we may calculate \phi_{f p} as

\phi_{f p}=V_{t} \ln \left(\frac{N_{a}}{n_{j}}\right)=(0.0259) \ln \left(\frac{10^{15}}{1.5 \times 10^{10}}\right)=0.288 \mathrm{~V}

Then the metal-semiconductor work function difference is

\phi_{m s}=\phi_{m}^{\prime}-\left(\chi^{\prime}+\frac{E_{g}}{2 e}+\phi_{f p}\right)=3.20-(3.25+0.560+0.288)

or

\phi_{m s}=-0.898 \mathrm{~V}

Comment

The value of \phi_{m s} will become more negative as the doping of the p-type substrate increases.

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